Bidirectional Microwave-optical Transduction Based on Integration: B. Device Characterization

Table of Links

• Introduction

  
  

• Results

• A. Physics and design

• B. Device characterization

• C. Bidirectional microwave-optical transduction

• D. Pulsed transduction

  
  

• Discussion

• Acknowledgments

• Appendix A: Theory

• Appendix B: Fabrication process flow

• Appendix C: Optical characterization

• Appendix D: Characterization of acoustic resonances

• Appendix E: Characterization of bidirectional transduction

• Appendix F: Optimization of optical extraction efficiency

B. Device characterization

We perform metrological characterization to affirm the integrity of the stack. Shown in Fig. 2a, the region of suspended cladding is first identified through optical micrography; the released substrate below leads to a contrast in the image. To further access the layer structure, we use focused ion beam milling to create an opening on the device surface at the suspension site. This opening provides sufficient clearance to directly image the cladding acoustic resonator, pictured in Fig. 2b, confirming the removal of silicon.

We then characterize the transducer as an optoelectronic network with one microwave port, two optical ports, and one auxiliary electrical DC port. Each optical port comprises an edge-coupled lensed fiber and on-chip bus waveguide terminated by 1D nanotapers designed for TE-polarized light, yielding a fiber-to-fiber coupling efficiency of −8 dB. For adjusting the frequency splitting between optical supermodes, a bias voltage is applied to the DC port to drive either the piezoelectric actuator [44] or an integrated thermo-optic heater placed in the vicinity of the micro-rings (Appendix C 2). The former affords no additional heat load and is hence cryogenic-compatible, whereas the latter provides an easy alternative for fast room-temperature characterization. The avoided mode crossing characteristic of a photonic molecule is exemplified in Fig. 2c. We access the HBARs through the microwave port. Calibrated high-frequency probes are used to contact the top and bottom electrode pads of the piezoelectric actuator, effectively linking the acoustic resonator with a transmission line. The reflection spectrum (Fig. 2d) reveals predominantly one single series of HBARs with a free spectral range (FSR) of 320 MHz, which corresponds to the acoustic length of the cladding. The transduction acoustic mode at 3.48 GHz exhibits a typical total linewidth of 13 MHz with a microwave extraction efficiency of κex,m/κm ≈ 11%. The microwave response is distinct from that of an identical stack composition with unreleased substrate. There, a periodic envelope corresponding to the cladding modes that are more strongly coupled to the microwave is superimposed over the full-stack HBAR response (Appendix D and Ref. [40]). The absence of these full-stack modes provide another piece of evidence of successful cladding suspension. Finally, we study the device acousto-optic response in the triply resonant configuration, where the transducer effectively operates as a resonant single-sideband modulator. The optical output containing both the pump at the symmetric-mode frequency and generated sideband at the antisymmetric-mode frequency are mixed by a photodetector. Such a beat-note spectrum shown in Fig. 2e displays response peaks aligned with the HBAR frequencies in Fig. 2d, demonstrating three-wave mixing.